0571-26692003
No. 181 Geyazhuang, Xihu District,Hangzhou, Zhejiang, P.R. China
This project solves the problem of long-term stable operation of plasma under high frequency and pressure and develops a compact light source product system through the forward development of the whole process. In addition, it carries out high-resolution imaging and develops metal compound materials, optical components and other supporting applications.
1. It is applied to the development of high-resolution imaging system.
2. It is applied to the development of precise photochemical reaction system.
3. It is applied to the development of optical components with in-situ wavelength, to accelerate the R&D of precision optical systems.
1.High-frequency nanosecond pulse power supply
Successfully develop a highly compact high-frequency nanosecond pulse power supply.
2.Plasma simulation software
Successfully develop a high-fidelity plasma simulation model, to accurately predict the
evolution and distribution of plasma instability under different driving modes.
3.Development of compact plasma system
Fully and independently develop highly compact plasma light source system, and complete
several generations of product iterations, to form a complete core technology accumulation
and barrier.
